Thermally-excited MEMS cantilever resonator for gas sensing

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

Volumn 7, Issue 2, 2009, Pages 119-122

  Dong, Ying ^a   Gao, Wei ^a   You, Zheng ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Cantilever; Resonator; Thermal excitation

Indexed keywords

BULK-SILICON PROCESS; CANTILEVER; CANTILEVER RESONATORS; EXCITATION POWER; FINITE-ELEMENT ANALYSIS; GAS CONCENTRATIONS; GAS MOLECULES; GAS SENSING MATERIALS; GAS-SENSING; ICP ETCHINGS; LINEAR RELATIONSHIPS; MASS CHANGES; PHYSICAL ABSORPTIONS; QUALITY FACTORS; RESONANT AMPLITUDES; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFTS; SILICON-ON-INSULATOR WAFERS; THERMAL EXCITATION;

ATOMIC FORCE MICROSCOPY; CHEMICAL REACTIONS; GAS ABSORPTION; GAS DETECTORS; GASES; NANOCANTILEVERS; NATURAL FREQUENCIES; RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TEMPERATURE DISTRIBUTION; THERMOANALYSIS;

FREQUENCY RESPONSE;

EID: 64849090016     PISSN: 16726030     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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