Fabrication of metallic nanoporous films by dealloying

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 923-927

  Yeh, W J ^a   Chava, Shilpa ^a  

^a UNIVERSITY OF IDAHO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHINGS; CONNECTED NETWORKS; CU-ZN ALLOYS; DEALLOYING; DIFFERENT PROCESS; ENERGY DISPERSIVE X-RAY SPECTROSCOPIES; ETCHING TIME; FABRICATION TECHNIQUES; HIGH SURFACE AREAS; NANO-POROUS FILMS; NANO-POROUS STRUCTURES; NANO-STRUCTURED; NANOPOROUS GOLDS; NANOPOROUS MATERIALS; NANOSTRUCTURED COPPERS; PORE MORPHOLOGIES; POROUS STRUCTURES; SODIUM HYDROXIDE SOLUTIONS;

ACIDS; ALLOYS; COPPER COMPOUNDS; ETCHING; FABRICATION; GOLD; LEAD; NANOSTRUCTURES; NITRIC ACID; PORE SIZE; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SODIUM; SULFURIC ACID; TIN; TITANIUM COMPOUNDS; ZINC;

FILMS;

EID: 64549121186     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3032903     Document Type: Article

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