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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 964-968

Photothermal excitation of a single-crystalline silicon cantilever for higher vibration modes in liquid

(4) Nishida, Shuhei a Kobayashi, Dai a Kawakatsu, Hideki a Nishimori, Yuki b

a INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

b SHIZUOKA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORBANCE; ATOMIC FORCES; EXCITATION EFFICIENCIES; FLEXURAL MODES; HOMOGENEOUS MATERIALS; INCIDENT LIGHT POWER; LONGITUDINAL DIRECTIONS; MODE SHAPES; OPTICAL WAVELENGTHS; PHOTOTHERMAL EXCITATIONS; SINGLE-CRYSTALLINE SILICONS; TRANSMITTED LIGHTS; VIBRATION AMPLITUDES; VIBRATION MODES;

CRYSTALLINE MATERIALS; LIQUIDS; NANOCANTILEVERS; SEMICONDUCTING SILICON COMPOUNDS; STRENGTH OF MATERIALS; SURFACE DIFFUSION; THERMAL DIFFUSION IN LIQUIDS; THERMAL STRESS; THERMOELASTICITY; VIBRATING CONVEYORS;

ATOMIC FORCE MICROSCOPY;

EID: 64549086405 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3077487 Document Type: Article

Times cited : (26)

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