Sol-gel prepared single wall carbon nanotube SnO2 thin film for micromachined gas sensor

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 3, Issue , 2004, Pages 232-235

  Gong, Jianwei ^a   Chen, Quanfang ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

MEMS; Nanocrystalline Sno2; SMO; SWNT Sol Gel

Indexed keywords

CHEMICAL SENSORS; ELECTRONS; GRAIN BOUNDARIES; HYDROGEN; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSITIVITY ANALYSIS; SOL-GELS; THIN FILMS; TIN; TIN COMPOUNDS;

DEPLETION THICKNESS; FABRICATION PROCESS; NANOCRYSTALLINE SNO2; SWNT;

CARBON NANOTUBES;

EID: 6444239606     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Won JaeMoon, Ji Haeng Yu and Gyeong Man Choi, 2002, Sensors and Actuators B 87 464-470
2. B.K.Miremadi, K.Colbow: Sensors and Actuators B46 (1998) 30-3
3. S. Seal, S. Shukla, Nanocrystalline SnO gas sensors in view of surface reactions and modifications, JOM 54 (9) (2002) 35-38, 60.
4. Simon, I. et al., 2001, Sensors and Actuators B 73 1-26
5. K.G. Ong, K. Zeng, C.A. Grimes, IEEE Sensor J. 2 (2002) 82-88.
6. Jing Kong, et al, 28 JANUARY 2000 VOL 287 SCIENCE
7. M. Bienfait, B. Asmussen, M. Johnson, P. Zeppenfeld, Surf. Sci. 1-3 (2000) 243-248.
8. Jianwei Gong, et al, IEEE Sensors 2003 Toronto, Canada, October 22-24, 2003.
9. C. Xu, J. Tamaki, N. Miura, and N. Yamazoe, Sensors and Actuators B 3, 147 (1991).