Estimation of hydrogen radical density generated from various kinds of catalysts

Thin Solid Films

Volumn 517, Issue 12, 2009, Pages 3449-3451

  Abe, K ^a   Ida, M ^a   Izumi, A ^a   Terashima, S ^b   Sudo, T ^b   Watanabe, Y ^b   Fukuda, Y ^b  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b Extreme Ultra Violet Lithography System Development Association   (Japan)

Author keywords

Activation energy; Catalyst; Cleaning; HW; Hydrogen radical

Indexed keywords

CATALYST MATERIALS; CATALYST TEMPERATURES; HW; HYDROGEN RADICAL; MONITORING SYSTEMS;

ACTIVATION ENERGY; ARRHENIUS PLOTS; CATALYSIS; CATALYSTS; HYDROGEN; MOLYBDENUM; PLATINUM; TANTALUM;

HYDROGEN PRODUCTION;

EID: 64349095809     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.044     Document Type: Article

References (6)

1. Silverman P.J. Proc. SPIE 4343 (2002) 12
2. Yulin S.A., Kuhlmann T., Feigl T., and Kaiser N. Proc. SPIE 4343 (2001) 607
3. Oizumi H., Yamanashi H., Nishiyama I., Hashimoto K., Ohsono S., Masuda A., Izumi A., and Matsumura H. Proc. SPIE 5751 (2005) 1147
4. Takashima S., Hori M., Goto T., Kono A., Ito M., and Yoneda K. Appl. Phys. Lett. 75 (1999) 3929
5. Umemoto H., Ohara K., Morita D., Nozaki Y., Masuda A., and Matsumura H. J. Appl. Phys. 91 (2002) 1650
6. Redman S.A., Chung C., and Ashfold M.N.R. Diamond Relat. Mater. 8 (1999) 1383