H atom production in a hot filament chemical vapour deposition reactor

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1383-1387

  Redman, S A ^a   Chung, C ^a   Ashfold, M N R ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Atomic hydrogen; Case diagnostics; Chemical vapour deposition; Diamond

Indexed keywords

ACTIVATION ENERGY; ATOMS; CHEMICAL VAPOR DEPOSITION; DIAMONDS; DISSOCIATION; ELECTRONIC DENSITY OF STATES; HEATING; HYDROGEN; TEMPERATURE;

CASE DIAGNOSTICS; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; MULTIPHOTON IONIZATION SPECTROSCOPY;

CHEMICAL REACTORS;

EID: 0032594409     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00015-1     Document Type: Article

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