SEMI E133 the process control system standard: Deriving a software interoperability standard for advanced process control in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 20, Issue 4, 2007, Pages 408-420

  Moyne, James R ^a   Hajj, Hazem ^b   Beatty, Kevin ^c   Lewandowski, Russell ^d  

^a Applied Global Services Division   (United States)

^b INTEL CORPORATION   (United States)

^c SEAGATE TECHNOLOGY   (United States)

^d Buffalo Automation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED PROCESS CONTROLS; COMMERCIAL APPLICATIONS; DATA COLLECTIONS; DATA MODELS; EQUIPMENT DATA ACQUISITIONS; EVENT-DRIVEN ARCHITECTURES; FAULT CLASSIFICATIONS; FAULT PREDICTIONS; I/O INTERFACES; INPUT/OUTPUT; PROCESS CONTROL SYSTEMS; PROCESS EQUIPMENTS; R2R CONTROLS; RUN-TO-RUN CONTROLS; SEMI STANDARDS; SEMICONDUCTOR MANUFACTURING; SERVICE-ORIENTED; SOFTWARE INTEROPERABILITY; XML REPRESENTATIONS;

CONCURRENCY CONTROL; FAULT DETECTION; FINITE DIFFERENCE METHOD; FUNCTIONAL GROUPS; INTELLIGENT CONTROL; MARKUP LANGUAGES; QUALITY CONTROL; QUERY PROCESSING; SEMICONDUCTOR MATERIALS; SPECIFICATIONS; STANDARDS; XML;

STATISTICAL PROCESS CONTROL;

EID: 64149103930     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.907617     Document Type: Article

References (17)

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