Nanoforming of metallic glass with nano-scale die fabricated by focused ion beam

Journal of Metastable and Nanocrystalline Materials

Volumn 24-25, Issue , 2005, Pages 291-294

  Saotome, Yasunori ^a   Okaniwa, Suguru ^a   Zhang, Tao ^b   Inoue, Akihisa ^b  

^a GUNMA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Die; FIB; MEMS; Metallic glass; Microforming; Nanoforming; Superplasticity

Indexed keywords

FABRICATION TECHNIQUES; FIB; LOW STRESS; MICRO GEARS; MICROFORMING; NANO IMPRINTS; NANO-MACHINING; NANO-SCALE; NANO-STRUCTURES; NANOFORMING; NEWTONIANS; STORAGE DEVICES; SUPER-COOLED LIQUID STATE; ZR-BASED METALLIC GLASS;

DIES; FABRICATION; FLUID DYNAMICS; FOCUSED ION BEAMS; GLASS; LIQUID METALS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; PLATINUM; SUPERCOOLING; SUPERPLASTICITY; ZIRCONIUM;

METALLIC GLASS;

EID: 64049112029     PISSN: 14226375     EISSN: None     Source Type: Journal    
DOI: 10.4028/www.scientific.net/JMNM.24-25.291     Document Type: Article

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