Hydrogen gas sensors fabricated on atomically flat 4H-SiC webbed cantilevers

Materials Science Forum

Volumn 600-603, Issue , 2009, Pages 1199-1202

  Neudeck, Philip G ^a   Spry, David J ^b   Trunek, Andrew J ^b   Evans, Laura J ^a   Chen, Liang Yu ^b   Hunter, Gary W ^a   Androjna, Drago ^a  

^a NASA GLENN RESEARCH CENTER   (United States)

^b OHIO AEROSPACE INSTITUTE   (United States)

Author keywords

Atomically flat; Gas sensor; Hydrogen; Hydrogen sensor; On axis; Platinum; Schottky diode; Step free surface; Webbed cantilevers

Indexed keywords

CHEMICAL SENSORS; DIODES; GAS DETECTORS; NANOCANTILEVERS; PLATINUM; PLATINUM COMPOUNDS; RESISTORS; SCHOTTKY BARRIER DIODES; SILICON CARBIDE;

ATOMICALLY FLAT; GAS-SENSORS; HEATER RESISTORS; HYDROGEN GAS SENSORS; HYDROGEN SENSOR; ON-AXIS; SCHOTTKY DIODES; SECOND GENERATION; STEP-FREE SURFACE; WEBBED CANTILEVER;

HYDROGEN;

EID: 63849087575     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.600-603.1199     Document Type: Conference Paper

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