Gaussian beams and spatial modulation in nanopositioning

IEEE Transactions on Instrumentation and Measurement

Volumn 58, Issue 4, 2009, Pages 1003-1009

  Haddad, Darine ^a,b   Juncar, Patrick ^c   Genevès, Gérard ^a   Wakim, Marwan ^a  

^a LABORATOIRE NATIONAL DE MÉTROLOGIE ET D ESSAIS LNE   (France)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Conservatoire National des Arts et des Métiers ^*  (France)

Author keywords

Gaussian beams; Position control; Position measurement; Spatial light modulators; Synchronous detection

Indexed keywords

GAUSSIAN DISTRIBUTION; GAUSSIAN NOISE (ELECTRONIC); GRAVITATION; LIGHT MODULATION; LIGHT MODULATORS; OPTOELECTRONIC DEVICES; POSITION CONTROL; POSITION MEASUREMENT; TRELLIS CODES;

ABSOLUTE POSITIONS; ELECTRO-MAGNETIC FORCES; FUNDAMENTAL CONSTANTS; GAUSSIAN BEAM PROPAGATION; GRAVITATIONAL FORCES; LOCK-IN AMPLIFIERS; LONG-TERM STABILITIES; NANO-POSITIONING; NANOMETRIC RESOLUTIONS; NOVEL METHODS; POSITION-SENSING; RELATIVE UNCERTAINTIES; SPATIAL LIGHT MODULATORS; SPATIAL MODULATIONS; SYNCHRONOUS DETECTION;

GAUSSIAN BEAMS;

EID: 63449133620     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2008.2008475     Document Type: Conference Paper

References (25)

1. B. P. Kibble, "A measurement of the gyromagnetic ratio of the proton by the strong field method," in Atomic Masses and Fundamental Constants J. H. Sanders and A. H. Wapstr, Eds. New York: Plenum, 1976, p. 545.
2. B. D. Josephson, "Possible new effects in superconductive tunnelling," Phys. Lett., vol. 1, no. 7, pp. 251-253, Jul. 1962.
3. K. von Klitzing, G. Dorda, and M. Pepper, "New method for high-accuracy determination of the fine-structure constant based on quantized hall resistance," Phys. Rev. Lett., vol. 45, no. 6, pp. 494-497, Aug. 1980.
4. B. P. Kibble, I. A. Robinson, and J. H. Bellis, "A realization of the SI watt by the NPL moving-coil balance," Metrologia, vol. 27, no. 4, pp. 173-192, Mar. 1990.
5. E. R. Williams, R. L. Steiner, D. B. Newell, and P. T. Olsen, "Accurate measurement of the Planck constant," Phys. Rev. Lett., vol. 81, no. 12, pp. 2404-2407, Sep. 1998.
6. R. L. Steiner, D. B. Newell, and E. R. Williams, "A result from the NIST watt balance and an analysis of uncertainties," IEEE Trans. Instrum. Meas., vol. 48, no. 2, pp. 205-208, Apr. 1999.
7. W. Beer, A. L. Eichenberger, B. Jeanneret, B. Jeckelmann, A. R. Pourzand, P. Richard, and J. P. Schwarz, "Status of the METAS watt balance experiment," IEEE Trans. Instrum. Meas., vol. 52, no. 2, pp. 626-630, Apr. 2003.
8. G. Genevès, P. Gournay, A. Gosset, M. Lecollinet, F. Villar, P. Pinot, P. Juncar, A. Clairon, A. Landragin, D. Holleville, F. Pereira, J. David, M. Besbes, F. Alves, L. Chassagne, and S. Topçu, "The BNM watt balance project," IEEE Trans. Instrum. Meas., vol. 54, no. 2, pp. 850-853, Apr. 2005.
9. A. Picard, M. Stock, H. Fang, T. J. Witt, and D. Reymann, "The BIPM watt balance," IEEE Trans. Instrum. Meas., vol. 56, no. 2, pp. 538-542, Apr. 2007.
10. N. Bobroff, "Recent advances in displacement measuring interferometry," Meas. Sci. Technol., vol. 4, no. 9, pp. 907-926, Sep. 1993.
11. S. Topcu, L. Chassagne, D. Haddad, P. Juncar, and Y. Alayli, "Heterodyne interferometric technique for displacement control at the nanometric scale," Rev. Sci. Instrum., vol. 74, no. 11, pp. 4876-4880, Nov. 2003.
12. C. D. Kissinger, "Fibre optic displacement measuring apparatus," U.S. Patent 3 940 608, Sep. 27, 1967.
13. R. O. Cook and C. W. Hamm, "Fiber optic lever displacement transducer," Appl. Opt., vol. 18, no. 19, pp. 3230-3241, Oct. 1979.
14. A. Shimamoto and K. Tanaka, "Optical fiber bundle displacement sensor using an ac-modulated light source with subnanometer resolution and low thermal drift," Appl. Opt., vol. 34, no. 25, pp. 5854-5860, Sep. 1995.
15. W. C. Heerens, "Application of capacitance techniques in sensor design," J. Phys. E, Sci. Instrum., vol. 19, no. 11, pp. 897-906, Nov. 1986.
16. F. N. Toth and G. C. M. Meijer, "A low-cost, smart capacitive position sensor," IEEE Trans. Instrum. Meas., vol. 41, no. 6, pp. 1041-1044, Dec. 1992.
17. L. K. Baxter, Capacitive Sensors, Jul. 2000. [Online]. Available: http://www.capsense.com/capsense-wp.pdf
18. A. Makynen, J. T. Kostamovaara, and R. A. Myllyla, "Displacement sensing resolution of position-sensitive detectors in atmospheric turbulence using retroreflected beam," IEEE Trans. Instrum. Meas. vol. 46, no. 5, pp. 1133-1136, Oct. 1997.
19. H. Andersson, "Position sensitive detectors: Device technology and applications in spectroscopy," Ph.D. dissertation, Dept. Inf. Technol. Media, Mid Sweden Univ., Sundsvall, Sweden, 2008.
20. T. R. Armstrong and M. P. Fitzgerald, "An autocollimator based on the laser head of a compact disc player," Meas. Sci. Technol., vol. 3, no. 11, pp. 1072-1076, Nov. 1992.
21. A. Siegman, Lasers. Maplewood, NJ: Univ. Sci. Books, 1986, pp. 663-681.
22. H. Kogelnik and T. Li, "Laser beams and resonators," Appl. Opt., vol. 5, no. 10, pp. 1550-1566, Oct. 1966.
23. R. L. McCally, "Measurement of Gaussian beam parameters," Appl. Opt., vol. 23, no. 14, p. 2227, Jul. 1984.
24. P. Belland and J. P. Crenn, "Changes in the characteristics of a Gaussian beam weakly diffracted by a circular aperture," Appl. Opt. vol. 21, no. 3, pp. 522-527, Feb. 1982.
25. D. Haddad, P. Juncar, and G. Genevès, "Use of diffracted Gaussian beams in position sensing," in Proc. CPEM, 2008, pp. 286-287.