Interdigitated low-loss ohmic RF-MEMS switches

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 327-330

  Gaddi, R ^a   Bellei, M ^a   Gnudi, A ^a   Margesin, B ^b   Giacomozzi, F ^b  

^a UNIVERSITY OF BOLOGNA   (Italy)

^b ITC IRST   (Italy)

Author keywords

Low loss; Model; Ohmic; Rf mems; Switch

Indexed keywords

ACTUATORS; ELECTRIC RESISTANCE; ELECTRODEPOSITION; ELECTROSTATICS; SWITCHES; WIRELESS TELECOMMUNICATION SYSTEMS;

ACTUATION ELECTRODES; LOW-LOSS; OHMIC SWITCHES; RF-MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344294762     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. E.R. Brown, "RF-MEMS Switches for Reconfigurable Integrated Circuits," IEEE Trans. MTT, Vol.46, pp.1868-1880, Nov. 1998.
2. J.B. Muldavin, G.M. Rebeiz, "High-Isolation CPW MEMS Shunt Switches - Part 1: Modeling," IEEE Trans. Microwave Theory Tech., Vol.48, pp.1045-1052, June 2000.
3. A. Pothier, et Al., "Low Loss Ohmic Switches For RF Frequency Applications," 32nd Eu. Microwave Conf. Proc., Milan, IT, 23-27 Sept. 2002, pp.805-808.
4. F. Giacomozzi, B. Margesin, L. Ferrario, V. Guarnieri, M. Zen, "Micromachined Switches: Realization and Test," Proc. 3rd MEMSWAVE Workshop, Heraklion, Greece, 26-28 June 2002.
5. G. Dambrine, A. Cappy, F. Heliodore, E. Playez, "A New Method for Determining the FET Small-Signal Equivalent Circuit," IEEE Trans. Microwave Theory Tech., Vol.36, pp.1151-1159, July 1988.