High growth rate and gas utilisation in a-Si:H solar cells made with amplitude modulated VHF-CVD

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1748-1751

  Rath, J K ^a   Biebericher, A C W ^a   Schropp, R E I ^a   Van Der Weg, W F ^a   Goedheer, W J ^b  

^a UTRECHT UNIVERSITY   (Netherlands)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTANT PHOTOCURRENT METHODS (CPM); DEFECT DENSITY; FREQUENCY DEPOSITION; MULTICHAMBER SYSTEMS;

ACTIVATION ENERGY; AMORPHOUS SILICON; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PARAMETER ESTIMATION; PHOTOCONDUCTIVITY; PHOTOCURRENTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERIZATION;

SOLAR CELLS;

EID: 6344292350     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. M. Sano, K.Saito, S.Okabe, S.Sugiyama, K.Ogawa, Tech. Digest Int'l PECVD-12 (2001) p45.
2. G. J. Nienhuis, W. J. Goedheer, E. G. A. Hamers, W. G. J. H. M. van Sark, and J. Bezemer, J. Appl. Phys. 82, 2060 -1997.
3. E.A.G.Hammers, Ph.D Thesis, Utrecht University, The Netherlands (1998).
4. A.C.W.Biebericher, W.F.van der Weg, J.K.Rath, M.R.Akdim, W.J.Goedheer, J. Vac. Sci. Tech. A 21(1), 156 (2003).
5. th IEEE photovoltaivc specialts conference, Washington DC, USA (1996).
6. R.A. Street, Phys. Rev. B. 44, 10610 (1991).