SOI processing of a ring electrokinetic chaotic micromixer

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 1, Issue , 2004, Pages 292-295

  Zhang, Y T ^a   Chen, H ^a   Mezic, I ^a   Meinhart, C D ^a   Petzold, L ^a   MacDonald, N C ^a  

^a University of California   (United States)

Author keywords

Chaotic mixer; Electroosmotic flow; FIB; Silicon bulk micromachining; SOI

Indexed keywords

ASPECT RATIO; COMPUTATIONAL FLUID DYNAMICS; DNA; ELECTROOSMOSIS; FLUIDICS; MICROMACHINING; REYNOLDS NUMBER;

CHAOTIC MIXERS; ELECTROOSMOTIC FLOW; FOCUSED ION BEAM (FIB); SILICON BULK MICROMACHINING; SOI;

SILICON WAFERS;

EID: 6344282714     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)

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