Process simulation for contact print microlithography

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 28-31

  Darhuber, A A ^a   Miller, S M ^a   Troian, S M ^a   Wagner, S ^a  

^a Princeton University   (United States)

Author keywords

Intaglio; Liquid microstructures; Microlithography; Offset printing; Surface pattern

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; EXCIMER LASERS; HYDROPHOBICITY; MICROSTRUCTURE; NUMERICAL ANALYSIS; OFFSET PRINTING; SURFACE TENSION;

GROOVES; INTAGLIO; LIQUID MICROSTRUCTURES; SURFACE PATTERN;

PHOTOLITHOGRAPHY;

EID: 6344281010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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