Development of an FET pressure sensor model and use to predict sensor behaviour as a function of electrode geometry

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 185-188

  Hynes, E ^a   Elebert, P ^a   O'Neill, M ^a   Berney, H ^b   Lane, W A ^b   Kelly, G ^b   Hill, M ^b  

^a ANALOG DEVICES   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

FET; Finite difference; Micromachine; Pressure; Sensor

Indexed keywords

DIAPHRAGMS; ELECTRODES; FINITE ELEMENT METHOD; FUNCTIONS; INTERFEROMETRY; MATHEMATICAL MODELS; MICROMACHINING; POLYSILICON;

MICROGRAPH; POLYSILICON DIAPHRAGM; PRESSURE SENSORS;

SENSORS;

EID: 6344280937     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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