Novel thermal microactuator based on CVD-diamond films

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 483-486

  Gluche, P ^a   Leuner, R ^a   Kohn, E ^a   Rembe, C ^a   Aus der Wiesche, S ^a   Hofer, E P ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING DIAMONDS; SEMICONDUCTING FILMS;

THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 0032266788     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)