Compact damping models for lateral structures including gas rarefaction effects

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 162-165

  Veijola, Timo ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Damping in microstruc tures; Effective viscosity; Gas damping; Knudsen number; Rarefied Couette flow

Indexed keywords

APPROXIMATION THEORY; FUNCTIONS; MATHEMATICAL MODELS; MICROSTRUCTURE; PROBLEM SOLVING; SHEAR STRESS; THIN FILMS; VISCOSITY;

DAMPING OF MICROSTRUCTURE; EFFECTIVE VISCOSITY; GAS DAMPING; KNUDSEN NUMBER; RAREFIED COUETTE FLOW;

DAMPING;

EID: 6344256968     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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