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Volumn B, Issue , 2003, Pages 1048-1052
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Quantitative correlation of the metastable defect in CZ-silicon with different impurities
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Author keywords
[No Author keywords available]
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Indexed keywords
DEFECT CONCENTRATION;
METASTABLE DEFECTS;
MICROSCOPIC STRUCTURES;
QUANTITATIVE CORRELATIONS;
BORON;
CORRELATION METHODS;
DOPING (ADDITIVES);
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
IMPURITIES;
MATHEMATICAL MODELS;
OXYGEN;
PHOTOCONDUCTING DEVICES;
SILICON;
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EID: 6344254783
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (30)
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References (7)
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