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Volumn B, Issue , 2003, Pages 1048-1052

Quantitative correlation of the metastable defect in CZ-silicon with different impurities

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT CONCENTRATION; METASTABLE DEFECTS; MICROSCOPIC STRUCTURES; QUANTITATIVE CORRELATIONS;

EID: 6344254783     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (30)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.