Design & simulation of a mechanical amplifier for inertial sensing applications

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 1, Issue , 2004, Pages 343-346

  Kham, M N ^a   Houlihan, R ^a   Kraft, M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Capacitive accelerometer; Mechanical leverage system; Sensitivity

Indexed keywords

CAPACITIVE ACCELEROMETER; INERTIAL SENSING; MECHANICAL AMPLIFIER; MECHANICAL LEVERAGE SYSTEM; SENSITIVITY;

AMPLIFICATION; CAPACITANCE; COMPUTER SIMULATION; ELASTIC MODULI; ELECTRODES; FINITE ELEMENT METHOD; INERTIAL NAVIGATION SYSTEMS; MECHANICAL ENGINEERING; PRODUCT DESIGN; REACTIVE ION ETCHING; SENSITIVITY ANALYSIS; SENSORS;

AMPLIFIERS (ELECTRONIC);

EID: 6344239060     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. T. A. Roessig, "Integrated MEMS Tuning Fork Oscillators for Sensor application" Univeristy of California, Berkeley, Ph.D, Thesis, 1998.
2. J. W. Weigold, K. Najafi, S. W. Pang, "Design and Fabrication of Submicrometer, Single Crystal Si Accelerometer", Journal of microelectro-mechanical systems, Vol. 10, pp 518-524, Dec 2001.
3. H. Kovacs, "Micromachined Transducers Sourcebook," GTA McGraw-Hill, 1998.
4. th International Workshop on Micro Electro Mechanical Systems, San Diego, pp 424-428, 1996.