Impurity and defect passivation in poly-Si films fabricated by aluminium-induced crystallisation

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1233-1236

  Widenborg, Per I ^a   Sproul, Alistair B ^a   Aberle, Armin G ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM-INDUCED CRYSTALLIZATION (ALC); GLASS SUBSTRATES; SURFACE OPTIMIZATION;

ALUMINUM; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; FABRICATION; HETEROJUNCTIONS; LIGHT TRANSMISSION; OPTIMIZATION; PASSIVATION; POLYSILICON; SEMICONDUCTOR DOPING; SURFACE ROUGHNESS;

THIN FILMS;

EID: 6344231595     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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7. P.H. La Marche, R. Levi-Setti and K. Lam, "Crystallographic contrast due to primary ion channelling in the scanning ion microscope", IEEE Trans.Nuc. Sci. NS-30, 1240 (1983).
8. J.I. Pankove, D.E. Carlson, J.E. Berkeyheiser and R.O. Wance, "Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen", Phys. Rev. Lett. 51, 2224 (1983).
9. M.A. Green and M.J. Keevers, "Optical Properties of Intrinsic Silicon at 300 K", Prog. Photov. 3, 189 (1995).
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12. P.I. Widenborg et al. "Assessment of Surface Structure and Quality of smooth AIC poly-Si films by UV Reflectance and FIB ion channelling", to be submitted to J. Appl. Phys.
13. A.G. Aberle, P.I. Widenborg, A. Straub, and N.-P. Harder, "Polycrystalline silicon on glass thin-film solar cell research at UNSW using the seed layer concept", this conference.