Reactive glow discharges: Comparison of steady-state versus pulsed operation

Journal of Analytical Atomic Spectrometry

Volumn 19, Issue 9, 2004, Pages 1268-1274

  Hastings, Elizabeth P ^a   Harrison, W W ^a  

^a University of Florida ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATHODES; GAS METERS; IONIZATION; MASS SPECTROMETRY; MATHEMATICAL MODELS; MONITORING; NITROGEN; SPUTTERING;

ION SIGNALS; METASTABLES; PULSED OPERATIONS; REACTIVE GASES;

GLOW DISCHARGES;

EID: 6344231461     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b406292m     Document Type: Conference Paper

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