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Volumn 24, Issue 3, 2009, Pages 1032-1036
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Some basic equations for the next generation of surface testers solving the problem of pileup, sink-in, and making area-function calibration obsolete
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Author keywords
[No Author keywords available]
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Indexed keywords
BASIC EQUATIONS;
CLASSICAL PROBLEMS;
DEGREES OF FREEDOMS;
DIRECT MEASUREMENTS;
INDENTER;
NORMAL STIFFNESS;
PARAMETER DETERMINATIONS;
SAMPLE SURFACES;
SINK-IN;
TILTING STIFFNESS;
CALIBRATION;
PARAMETER ESTIMATION;
STIFFNESS;
SURFACES;
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EID: 63149177239
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/jmr.2009.0077 Document Type: Article |
Times cited : (9)
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References (9)
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