High efficiency slicing of low resistance silicon ingot by wire electrolytic-spark hybrid machining

Journal of Materials Processing Technology

Volumn 209, Issue 7, 2009, Pages 3149-3155

  Wang, W ^a   Liu, Z D ^a   Tian, Z J ^a   Huang, Y H ^a   Liu, Z X ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Electrolytic spark; High efficiency; Hybrid machining; Silicon ingot; Slicing; Surface integrity

Indexed keywords

ELECTRIC DISCHARGE MACHINING; ELECTRIC SPARKS; ELECTRIC WINDINGS; ELECTROLYSIS; ELECTROLYTES; INGOTS; NONMETALS; PULSE GENERATORS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SIGNAL GENERATORS; WIRE;

ELECTROLYTIC-SPARK; HIGH EFFICIENCY; HYBRID MACHINING; SILICON INGOT; SLICING; SURFACE INTEGRITY;

SILICON WAFERS;

EID: 62949160319     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2008.07.029     Document Type: Article

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