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Volumn 143-147, Issue , 1997, Pages 1397-1406

Grain boundary diffusion and electromigration in Cu-Sn alloy thin films and their VLSI interconnects

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

Activation energies for grain boundary diffusion and electromigration; Cu Sn system; Electromigration; Grain boundary diffusion; Solute effect; Thin films

Indexed keywords

ACTIVATION ENERGY; BINARY ALLOYS; COPPER ALLOYS; DIFFUSION; ELECTROMIGRATION; GRAIN BOUNDARIES; INTEGRATED CIRCUIT INTERCONNECTS; RADIOACTIVE TRACERS; RADIOACTIVITY; THIN FILMS; VLSI CIRCUITS;

COMPARATIVE STUDIES; GRAIN-BOUNDARY DIFFUSION; GRAIN-BOUNDARY SELF-DIFFUSION; LOW TEMPERATURES; SOLUTE EFFECTS; SOLUTE SEGREGATION; TRACER DIFFUSION; VLSI INTERCONNECTS;

TIN ALLOYS;

EID: 62849128166 PISSN: 10120386 EISSN: 16629507 Source Type: Journal
DOI: 10.4028/www.scientific.net/DDF.143-147.1397 Document Type: Article

Times cited : (25)

References (16)

1
- 30244499803
- J. Li, T. E. Seidel and J. W. Mayer, Mater. Res. Bull. 19(8), 5(1994)
- (1994) Mater. Res. Bull , vol.19 , Issue.8 , pp. 5
- Li, J.¹ Seidel, T.E.² Mayer, J.W.³

2
- 0000423545
- Mishin and Chr. Herzig
- T. Surholt, Yu. M. Mishin and Chr. Herzig, Phys. Rev., B56, 3577(1994)
- (1994) Phys. Rev , vol.B56 , pp. 3577
- Surholt, T.¹ Yu, M.²

3
- 0028573842
- D. Gupta, Mater. Res. Soc. Sympo. Proc., 337, 209(1994)
- (1994) Mater. Res. Soc. Sympo. Proc , vol.337 , pp. 209
- Gupta, D.¹

4
- 0030108763
- C.-K. Hu, K. Y. Lee, K. L. Lee, C. Carrol Jr., E. G. Colgan and C. Stanis, J. Electrochem. Soc., 143, 1001(1996)
- (1996) J. Electrochem. Soc , vol.143 , pp. 1001
- Hu, C.-K.¹ Lee, K.Y.² Lee, K.L.³ Carrol Jr., C.⁴ Colgan, E.G.⁵ Stanis, C.⁶

5
- 62849121385
- C.-K. Hu, K. L. Lee, D. Gupta and P. Blauner, Mater. Res. Soc. Sympo. K/L 1996, Proc. in press
- C.-K. Hu, K. L. Lee, D. Gupta and P. Blauner, Mater. Res. Soc. Sympo. K/L 1996, Proc. in press

6
- 0027576799
- C. W. Park and R. W. Hoffman, Thin Solid Films, 226, 238(1993)
- (1993) Thin Solid Films , vol.226 , pp. 238
- Park, C.W.¹ Hoffman, R.W.²

7
- 0011374278
- Eds. G. R. Murch and A. S. Nowick Academic Press New York
- S. G. Rothman, Diffusion in Crystalline Solids. Eds. G. R. Murch and A. S. Nowick (Academic Press New York, 1984) pp.1-61
- (1984) Diffusion in Crystalline Solids , pp. 1-61
- Rothman, S.G.¹

8
- 0001331687
- R. T. P. Whipple, Philos. Mag., 45, 1225(1954)
- (1954) Philos. Mag , vol.45 , pp. 1225
- Whipple, R.T.P.¹

9
- 62849128674
- T. Suzouka, Trans. Jpn. Int. Metall., 2, 25(1961)
- T. Suzouka, Trans. Jpn. Int. Metall., 2, 25(1961)

10
- 0019087361
- U. Rheinhold, A. Neihard, G. Krautheim and A. Zeke, Phys. Stat. Solidi A62, 255(1980)
- (1980) Phys. Stat. Solidi , vol.A62 , pp. 255
- Rheinhold, U.¹ Neihard, A.² Krautheim, G.³ Zeke, A.⁴

11
- 36449008541
- K. L. Lee, C.-K. Hu and K. N. Tu, J. Appl. Phys., 78, 4428(1995)
- (1995) J. Appl. Phys , vol.78 , pp. 4428
- Lee, K.L.¹ Hu, C.-K.² Tu, K.N.³

12
- 0016940795
- I. A. Blech, J. Appl. Phys., 47, 1203(1976)
- (1976) J. Appl. Phys , vol.47 , pp. 1203
- Blech, I.A.¹

13
- 0005354991
- Eds. A. Lodding and T. Lagerwall Verlag der Zeitschrift Für Naturforschung, Tübingen
- D. Grimme, Atomic Transport in Solids and Liquids, Eds. A. Lodding and T. Lagerwall (Verlag der Zeitschrift Für Naturforschung, Tübingen, 1971) p 65
- (1971) Atomic Transport in Solids and Liquids , pp. 65
- Grimme, D.¹

14
- 0017538849
- D. Gupta, Metall. Trans., 8A, 1431(1977)
- (1977) Metall. Trans , vol.8 A , pp. 1431
- Gupta, D.¹

15
- 0004013464
- Physical Metallurgy
- Eds. R. W. Cahn and P. Haasen, Pub
- E. D. Hondros and M. P. Seah, Physical Metallurgy. Eds. R. W. Cahn and P. Haasen, North-Holland Phys. Pub., 1983, pp. 855-931
- (1983) North-Holland Phys , pp. 855-931
- Hondros, E.D.¹ Seah, M.P.²

16
- 0014563332
- S. J. Rothman and N. L. Peterson, Phys. Stat. Solidi, 35, 305(1969)
- (1969) Phys. Stat. Solidi , vol.35 , pp. 305
- Rothman, S.J.¹ Peterson, N.L.²

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