Packaging of silicon sensors for microfluidic bio-analytical applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 1, 2009, Pages

  Wimberger Friedl, Reinhold ^a   Nellissen, Ton ^a   Weekamp, Wim ^a   Delft, Jan Van ^a   Ansems, Will ^a   Prins, Menno ^a   Megens, Mischa ^a   Dittmer, Wendy ^a   Witz, Christiane De ^a   Iersel, Ben Van ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; BIOSENSORS; PROJECTILES; SIGNAL TRANSDUCTION;

ANALYTICAL APPLICATIONS; BIOLOGICAL RESPONSE; BIOSENSOR CHIPS; EFFECTIVE MASS; ELECTRICAL INTERCONNECTIONS; ELECTRONIC SUBSTRATES; FLUIDIC INTERCONNECTIONS; FUNCTIONALIZED; HIGH YIELDS; INTERCONNECTION DEVICES; MASS MANUFACTURING; MECHANICAL STRENGTHS; MEDICAL DIAGNOSTICS; MICRO-FLUIDIC; MOLECULAR DIAGNOSTICS; PARATHYROID HORMONES; POLYMER PACKAGES; READ-OUT ELECTRONICS; SANDWICH IMMUNOASSAYS; SENSOR CHIPS; SILICON-BASED;

CHIP SCALE PACKAGES;

EID: 62649126504     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/1/015015     Document Type: Article

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