A photopatternable silicone for biomems applications

Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Volumn , Issue , 2007, Pages 448-450

  Desai, Salil P ^a   Taff, Brian M ^a   Voldman, Joel ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

BioMEMS; Photolithography; Silicone

Indexed keywords

BIOMEMS; ELECTROPHORESIS; MAMMALS; SILICON WAFERS; SILICONES;

AUTOFLUORESCENCE; COATED SUBSTRATES; ELASTOMERIC STRUCTURE; MATERIAL BUILDING; MICROFABRICATION PROCESS; PHOTOPATTERNABLE; SILICON SUBSTRATES; SOFT LITHOGRAPHY;

SUBSTRATES;

EID: 62449243488     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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4. C. Khoury, G. A. Mensing, and. D. J. Beebe, Lab on a Chip, 2, 50-55 (2002).
5. R. Delille, et al., Journal of Microelectromechanical Systems, 15, 1108-1120 (2006).