Characterization of inhomogeneous samples by spectroscopic Mueller polarimetry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7140, Issue , 2008, Pages

  Foldyna, M ^a   De Martino, A ^a   Ossikovski, R ^a   Garcia Caurel, E ^a   Cattelan, D ^b   Licitra, C ^c  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b HORIBA LTD   (Japan)

^c CEA LETI   (France)

Author keywords

Depolarization; Finite spot size; Gratings; Inhomogeneous samples; Metrology; Mueller polarimetry

Indexed keywords

FINITE SPOT SIZE; GRATINGS; INHOMOGENEOUS SAMPLES; METROLOGY; MUELLER POLARIMETRY;

DEPOLARIZATION; ELLIPSOMETRY; SUBSTRATES;

POLARIMETERS;

EID: 62449163824     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.804690     Document Type: Conference Paper

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