Characterization of Pt thin films deposited by DC sputtering at different temperatures on Ti/glass and TiO2/Si substrates

Ferroelectrics

Volumn 225, Issue 1-4, 1999, Pages 319-325

  Cruz, Ma De La Paz ^a   Siqueiros, Jesús M ^b   Valenzuela, José ^b   Machorro, Roberto ^b   Portelles, Jorge J ^c   Fundora, Abel ^a  

^a CENTRO DE INVESTIGACIÓN CIENTÍFICA Y DE EDUCACIÓN SUPERIOR DE ENSENADA   (Mexico)

^b CENTRO DE CIENCIAS DE LA MATERIA CONDENSADA   (Mexico)

^c UNIVERSITY OF HAVANA   (Cuba)

Author keywords

Ferroelectric electrodes; Platinum

Indexed keywords

EID: 6244303725     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199908009141     Document Type: Article

References (10)

1. Y.M. Lee and H. G. Kim, Thin Solid Films 269, 75 (1995).
2. D. J. Taylor, J. Geerse and P. K. Larsen, Thin Solid Films, 263, 221 (1995).
3. S.T. Kim, H.H. Kim, M. Y. Lee and W. J. Lee, Jnp. J. Apply. Phys. 36, 294 (1997).
4. O. Auciello, R. Ramesh and Guest Editors, MRS Bulletin, No. 7, 21, (1996) and bibliography therein.
5. H.N. Al-Shareef, A.I. Kingon, X. Chen and K. R. Bellur, J. Mater Res., 9, No. 11, 2968 (1994).
6. K. Sreenivas, I. Reaney, T. Meader and N. Setter, J. Appl. Phys., 75, No. 1, 232 (1994).
7. I. Kondo, T. Yoneyama and O Takenaka, J. Vac. Sci. Technol. A, 10, No. 6, 3456 (1992).
8. J.O. Olowalafe, R.E. Jones, Jr, Aa.C. Campbell, R.I. Hegde and C.J. Mogab, J. Appl. Phhys, 73, No. 4, 1764 (1993).
9. K. Abe, H. Tomita, H. Toyoda, M. Imai and Y. Yokote, Jnp. J. Apply. Phys., 30, No. 9B, 2152 (1991).
10. E.D. Palik, Handbook of Optical Constants of Solids, II (Academic Press. Inc., 1985).