Micro-Raman investigation of stress distribution in laser drilled via structures

Applied Surface Science

Volumn 255, Issue 10, 2009, Pages 5546-5548

  Wasyluk, J ^a   Adley, D ^a   Perova, T S ^a   Rodin, A M ^b   Callaghan, J ^b   Brennan, N ^b  

^a TRINITY COLLEGE DUBLIN   (Ireland)

^b Silverstone House   (Ireland)

Author keywords

Heat affected zone; Laser micromachining; Micro Raman spectroscopy; Stress in silicon; Vertical electrical interconnects

Indexed keywords

CORROSION; HEAT AFFECTED ZONE; MICROMACHINING; PUMPING (LASER); RAMAN SPECTROSCOPY; SILICON WAFERS; SOLID STATE LASERS;

DIODE PUMPED SOLID STATE LASER; ELECTRICAL INTERCONNECTS; LASER DRILLING; LASER MACHINING; LASER MICRO-MACHINING; MAXIMUM STRESS; MICRO RAMAN SPECTROSCOPY; MICRO-RAMAN INVESTIGATIONS;

AMORPHOUS SILICON;

EID: 61549132936     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.09.004     Document Type: Article

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