SCOPUS 정보 검색 플랫폼

Journal of Crystal Growth

Volumn 311, Issue 5, 2009, Pages 1430-1434

Epitaxial growth of high-aspect-ratio TiN nanosheets on Si (1 0 0)

(2) Huang, Tsung Yen a Chen, Chien Chong a

a NATIONAL CHUNG CHENG UNIVERSITY (Taiwan)

Author keywords

A1. Growth models; A1. Nanostructures; B1. Nanomaterials; B1. Nitrides

Indexed keywords

ASPECT RATIO; NANOSHEETS; NANOSTRUCTURED MATERIALS; NITRIDES; SEMICONDUCTING SILICON COMPOUNDS; SILICON; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

A1. GROWTH MODELS; A1. NANOSTRUCTURES; ANISOTROPIC GROWTHS; B1. NANOMATERIALS; B1. NITRIDES; CRYSTALLINE PLANES; FORMATION MECHANISMS; GROWTH DIRECTIONS; HIGH ASPECT RATIOS; HRTEM IMAGES; LATTICE STRUCTURES; SI(1 0 0 );

EPITAXIAL GROWTH;

EID: 61449143426 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2008.12.022 Document Type: Article

Times cited : (2)

References (14)

1
- 0004134756
- Blackie Academic & Professional, New York
- Oyama S.T. The Chemistry of Transition Metal Carbides and Nitrides (1996), Blackie Academic & Professional, New York
- (1996) The Chemistry of Transition Metal Carbides and Nitrides
- Oyama, S.T.¹

2
- 0001324085
- Randhawa H. J. Vac. Sci. Technol. A 4 (1986) 2755
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2755
- Randhawa, H.¹

3
- 0025416282
- Hedenqvist P., Olsson M., Wallen P., Kassman A., Hogmark S., and Jacobson S. Surf. Coat. Technol. 41 (1990) 243
- (1990) Surf. Coat. Technol. , vol.41 , pp. 243
- Hedenqvist, P.¹ Olsson, M.² Wallen, P.³ Kassman, A.⁴ Hogmark, S.⁵ Jacobson, S.⁶

4
- 0020135740
- Ting C.Y. J. Vac. Sci. Technol. 21 (1982) 14
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 14
- Ting, C.Y.¹

5
- 36549092310
- Wang S.Q., Raaijmakers I., Burrow B.J., Suthar S., Redkar S., and Kim K.B. J. Appl. Phys. 68 (1990) 5176
- (1990) J. Appl. Phys. , vol.68 , pp. 5176
- Wang, S.Q.¹ Raaijmakers, I.² Burrow, B.J.³ Suthar, S.⁴ Redkar, S.⁵ Kim, K.B.⁶

6
- 0000216171
- Zega B., Kornmann M., and Amiguet J. Thin Solid Films 45 (1977) 577
- (1977) Thin Solid Films , vol.45 , pp. 577
- Zega, B.¹ Kornmann, M.² Amiguet, J.³

7
- 0036163864
- Kawano S., Takahashi J., and Shimada S. J. Mater. Chem. 12 (2002) 361
- (2002) J. Mater. Chem. , vol.12 , pp. 361
- Kawano, S.¹ Takahashi, J.² Shimada, S.³

8
- 0347753695
- Yang X.G., Li C., Yang B.J., Wang W., and Qian Y.T. Chem. Phys. Lett. 383 (2004) 502
- (2004) Chem. Phys. Lett. , vol.383 , pp. 502
- Yang, X.G.¹ Li, C.² Yang, B.J.³ Wang, W.⁴ Qian, Y.T.⁵

9
- 26844579348
- Kim T.S., Park S.S., and Lee B.T. Mater. Lett. 59 (2005) 3929
- (2005) Mater. Lett. , vol.59 , pp. 3929
- Kim, T.S.¹ Park, S.S.² Lee, B.T.³

10
- 38649142812
- Huang T.-Y., and Chen C.-C. J. Crystal Growth 310 (2008) 853
- (2008) J. Crystal Growth , vol.310 , pp. 853
- Huang, T.-Y.¹ Chen, C.-C.²

11
- 0001508491
- Vispute R.D., Chowdhury R., Tiwari P., and Narayan J. Appl. Phys. Lett. 65 (1994) 2565
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2565
- Vispute, R.D.¹ Chowdhury, R.² Tiwari, P.³ Narayan, J.⁴

12
- 14744272723
- Zheleva T., Jagannadham K., and Narayan J. J. Appl. Phys. 75 (1994) 860
- (1994) J. Appl. Phys. , vol.75 , pp. 860
- Zheleva, T.¹ Jagannadham, K.² Narayan, J.³

13
- 4544317335
- Bennema P., Meekes H., Boerrigter S.X.M., Cupper H.M., Deij M.A., van Eupen J., Verwer P., and Vlieg E. Cryst. Growth Des. 4 (2004) 905
- (2004) Cryst. Growth Des. , vol.4 , pp. 905
- Bennema, P.¹ Meekes, H.² Boerrigter, S.X.M.³ Cupper, H.M.⁴ Deij, M.A.⁵ van Eupen, J.⁶ Verwer, P.⁷ Vlieg, E.⁸

14
- 0000294284
- Fundamentals: thermodynamics and kinetics
- Hurle D.T.J. (Ed), Elsevier, Amsterdam
- Bennema P. Fundamentals: thermodynamics and kinetics. In: Hurle D.T.J. (Ed). Handbook of Crystal Growth vol. 1a (1993), Elsevier, Amsterdam 477
- (1993) Handbook of Crystal Growth , vol.1 a , pp. 477
- Bennema, P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.