Scaling of strain-induced mobility enhancements in advanced CMOS technology

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn , Issue , 2008, Pages 105-108

  Rim, Kern ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED CMOS; CIRCUIT PERFORMANCE; CMOS TECHNOLOGIES; CRITICAL ELEMENTS; INDUCED MOBILITIES; MATERIAL PROPERTIES; MOBILITY ENHANCEMENTS; POWER SUPPLIES; SCALED TECHNOLOGIES; STRAINED-SI;

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUITS; MOSFET DEVICES;

TECHNOLOGY;

EID: 60649113953     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2008.4734484     Document Type: Conference Paper

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