Micromachined piezoelectric structures for high-temperature sensors

Journal of Electroceramics

Volumn 22, Issue 1-3, 2009, Pages 180-184

  Sauerwald, Jan ^a   Schulz, Michal ^a   Richter, Denny ^a   Fritze, Holger ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Gas sensor; High temperature; Langasite; MEMS; Piezoelectricity

Indexed keywords

ACOUSTIC RESONATORS; CRYSTALLOGRAPHY; DOPING (ADDITIVES); GAS DETECTORS; HEATING; MEMS; MICROELECTROMECHANICAL DEVICES; NIOBIUM; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PRASEODYMIUM; PYROELECTRICITY; SENSORS; SILICON COMPOUNDS; STRONTIUM; TRANSITION METALS;

CHEMICAL DIFFUSION COEFFICIENTS; DIELECTRIC RELAXATION FREQUENCIES; ENHANCED DIFFUSIONS; FOUR ORDERS; FUNCTIONAL STRUCTURES; GAS SENSOR; HIGH TEMPERATURE; LANGASITE; LARGE SIZES; LOCAL HEATING; LOW LOSS; MICROMACHINED; MONOLITHIC STRUCTURES; OPTIMIZED PROCESS; PIEZOELECTRIC STRUCTURES; RESONANT SENSORS; RESONATOR QUALITIES;

RESONATORS;

EID: 60649098655     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9363-4     Document Type: Article

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