Piezoelectric driven resonant beam array in langasite (La3Ga5SiO14)

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 271-277

  Ansorge, Erik ^a   Schimpf, Stefan ^a   Hirsch, Soeren ^a   Sauerwald, Jan ^b   Fritze, Holger ^b   Schmidt, Bertram ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Beam array; High temperature; Langasite; Ultrasonic milling; Wet chemical etching

Indexed keywords

COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; GALLIUM COMPOUNDS; HIGH TEMPERATURE APPLICATIONS; MICROELECTROMECHANICAL DEVICES; SILICONES; VIBRATION MEASUREMENT;

BEAM ARRAY; LANGASITE; ULTRASONIC MILLING; WET CHEMICAL ETCHING;

LANTHANUM COMPOUNDS;

EID: 33751072975     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.013     Document Type: Article

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