Adaptive sliding mode control of a high-precision ball-screw-driven stage

Nonlinear Analysis: Real World Applications

Volumn 10, Issue 3, 2009, Pages 1480-1489

  Yau, Her Terng ^a   Yan, Jun Juh ^b  

^a FAR EAST UNIVERSITY   (Taiwan)

^b SHU TE UNIVERSITY   (Taiwan)

Author keywords

Adaptive sliding mode control; Friction dynamics; High precision control; Nano stage

Indexed keywords

CANTILEVER BEAMS; FRICTION; MACHINE TOOLS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; POSITION CONTROL; SLIDING MODE CONTROL; TRIBOLOGY;

ADAPTIVE SLIDING MODE CONTROL; ADAPTIVE SLIDING MODE CONTROLLERS; BALL-SCREW-DRIVEN; BALL-SCREW-DRIVEN STAGES; CONTROL APPROACHES; DYNAMIC BEHAVIORS; DYNAMIC REGIMES; FRICTION DYNAMICS; HIGH BANDWIDTHS; HIGH-PRECISION CONTROL; HIGH-PRECISION POSITIONS; ILLUSTRATIVE EXAMPLES; NANO-STAGE; POSITIONING AND TRACKING; POSITIONING PERFORMANCE; PROPORTIONAL INTEGRALS; SCIENTIFIC INSTRUMENTS; SEMI-CONDUCTOR FABRICATIONS; SLIDING MODE MOTIONS; STATIC AND DYNAMICS; SUB MICRONS; X-Y STAGES;

CONTROL THEORY;

EID: 60549097406     PISSN: 14681218     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nonrwa.2008.01.025     Document Type: Article

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