Automation and control for 300-mm process tools

Solid State Technology

Volumn 40, Issue 1, 1997, Pages 51-64

  Drew, Mitchell A ^a,c,d   Hanssmann, Michael G ^b,e   Camporese, Dan ^b,e,f,g  

^a Brooks Automation Inc   (United States)

^b Brooks Automation (Canada) Corp   (Canada)

^c Southern Illinois University   (United States)

^d New Hampsshire College   (United States)

^e UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^f Brooks Automation Canada ^*  (Canada)

^g Techware Systems Corp

Author keywords

[No Author keywords available]

Indexed keywords

EID: 6044256383     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)

1. International 300-mm initiative, "Equipment performance metrics," September 30, 1996.
2. 300-mm Interfaces & Carrires Informational Forum, SEMI/West, San Francisco, July 17, 1996.
3. Factory Intergration Working Group, Meeting Minuter, June 4-5, 1996.
4. Michell A, Drew, "Flexible tool interfaces increase responsiveness of process equipment suppliers," Solid State Technology, Vol. 39, July 1996.
5. "Intelligent Factory Tutorial," presented by Dr. Costas Spanos, University of California, Berkaley, SEMATECH AEC/APC Workshop VIII, Santa Fe, NM, October 27, 1996.
6. "Control system requirements for semiconductor process applications," presented by James Moyne, University of Michigan, SEMATECH AEC/APC Workshop VIII, Sante Fe, NM, October 28, 1996.
7. 300-mm ECS Factory Requirements Focus Team, preliminary "Top ten needs" list.