Flexible tool interfaces increase responsiveness of process equipment suppliers

Solid State Technology

Volumn 39, Issue 7, 1996, Pages

  Drew, Mitchell A ^a   Hofmeister, Christopher ^a  

^a Brooks Automation Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER INTEGRATED MANUFACTURING; COST EFFECTIVENESS; FACTORY AUTOMATION; INTERFACES (COMPUTER); VACUUM TECHNOLOGY;

INTRABAY AUTOMATED WAFER CARRIER HANDLING; PROCESS TOOL-TO-FACTORY INTERFACES; VACUUM LOAD LOCKS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030177139     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (28)