Piezoresistive properties of PEDOT:PSS

Microelectronic Engineering

Volumn 86, Issue 3, 2009, Pages 330-334

  Lang, Udo ^a   Rust, Philipp ^a   Schoberle, Bernd ^b   Dual, Jurg ^a  

^a Institute of Mechanical Systems (IMES)   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

Bulge test; Membrane; PEDOT:PSS; Piezoresistivity; Strain gauge factor

Indexed keywords

CONDUCTING POLYMERS; MATERIALS PROPERTIES; MEMBRANES; ORGANIC POLYMERS; PLASTIC DEFORMATION; POLYIMIDES; POLYMERS; POLYSTYRENES; SENSORS; STRAIN GAGES; THERMOELECTRIC EQUIPMENT; THICKNESS MEASUREMENT;

BULGE TEST; MEMBRANE; PEDOT:PSS; PIEZORESISTIVITY; STRAIN GAUGE FACTOR;

GAGES;

EID: 59049095323     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.10.024     Document Type: Article

References (25)

1. 2007 Roadmap. Technical report, iNEMI - International Electronics Manufacturing Initiative, 2007.
2. Kim H.A., Kim M.S., Chun S.Y., Park Y.H., Jeon B.S., Lee J.Y., Hong Y.K., Joo J., and Kim S.H. Molecular Crystals and Liquid Crystals 405 (2003) 161-169
3. Li Y., Cheng X.Y., Leung M.Y., Tsang J., Tao X.M., and Yuen M.C.W. Synthetic Metals 155 1 (2005) 89-94
4. Wu J., Zhou D., Too C.O., and Wallace G.G. Synthetic Metals 155 3 (2005) 698-701
5. Xue P., Tao X.M., and Tsang H.Y. Applied Surface Science 253 7 (2007) 3387-3392
6. Daoud W.A., Xin J.H., and Szeto Y.S. Sensors and Actuators B-Chemical 109 2 (2005) 329-333
7. Lam L., McBride J.W., and Swingler J. Journal of Applied Polymer Science 101 4 (2006) 2445-2452
8. Mateiu R., Lillemose M., Hansen T.S., Boisen A., and Geschke O. Microelectronic Engineering 84 5-8 (2007) 1270-1273
9. Kirchmeyer S., and Reuter K. Journal of Materials Chemistry 15 21 (2005) 2077-2088
10. O'Connell P.A., and McKenna G.B. Science 310 5753 (2005) 1431
11. Jansen K.M.B., Gonda V., and Ernst L.J. Journal of Electronic Packaging 127 4 (2005) 530-536
12. Huang C.K., Lou W.M., Tsai C.J., Tung-Chuan W.B., and Lin H.Y. Thin Solid Films 515 18 (2007) 7222-7226
13. Ohya H., Kudryavsev V.V., and Semenova S.I. Polyimide Membranes: Applications, Fabrications, and Properties (1996), Gordon and Breach Science Publisher S.A., Amsterdam
14. Kuoni A., Holzherr R., Boillat M., and de Rooij N.F. Journal of Micromechanics and Microengineering 13 4 (2003) S103-S107
15. Aslam M., Gregory C., and Hatfield J.V. Sensors and Actuators B-Chemical 103 1-2 (2004) 153-157
16. Lang U., Reichen M., and Dual J. Microelectronic Engineering 83 4-9 (2006) 1182-1184
17. Lang U., Rüst P., and Dual J. Microelectronic Engineering 85 5-6 (2008) 1050-1053
18. Schoeberle B., Wendlandt M., and Hierold C. Sensors and Actuators A: Physical 142 1 (2008) 242-249
19. 1998 HD MicroSystems, Pyralin PI2720 Processing Guidelines, 1998.
20. Lang U., and Dual J. Mechanical properties of BAYTRON P. 2004 4th IEEE International Conference on Polymers and Adhesives in Microelectronics and Photonics (2004), IEEE, New York 230-236
21. U. Lang, J. Dual. Mechanical properties of the intrinsically conductive polymer poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (pedot/pss), in: Mechanical Behavior of Materials X, Pts 1and 2, vol. 345-346 of Key Engineering Materials, pp. 1189-1192. Trans Tech Publications Ltd., Stafa-Zurich, 2007, pp. 1-2.
22. Vlassak J.J., and Nix W.D. Journal of Materials Research 7 12 (1992) 3242-3249
23. Woebcken W. Kunststoff-Taschenbuch (1992), Carl Hanser Verlag, Munich
24. Giraudet L., Fauveaux S., Simonetti O., Petit C., Blary K., Maurel T., and Belkhir A. Synthetic Metals 156 11-13 (2006) 838-842
25. U. Lang and J. Dual. Sensor bestehend aus organischen Materialien zur Messung mechanischer Grössen und deren nachfolgende Auswertung, 2007, CH 00337/07.