Parallel spring stages with flexures of micrometric cross-sections

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3202, Issue , 1998, Pages 209-220

  Henein, Simon ^a   Bottinelli, Stefano ^a   Clavel, Reymond ^a  

^a EPFL   (Switzerland)

Author keywords

Flexure; High precision robotics; Notch hinge pivot; Parallel spring stage; Surface roughness; Wire electro discharge machining

Indexed keywords

ELECTRIC DIPOLE MOMENTS; ELECTRIC DISCHARGE MACHINING; FRICTION; HINGES; MACHINING; MICROMACHINING; MICROSYSTEMS; ROBOTICS; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACES; WIRE;

FLEXURE; HIGH PRECISION ROBOTICS; NOTCH HINGE PIVOT; PARALLEL SPRING STAGE; WIRE ELECTRO-DISCHARGE MACHINING;

SPRINGS (COMPONENTS);

EID: 58849145605     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298039     Document Type: Conference Paper

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