Tabletop factory to fabricate 3D microstructures, nano manufacturing world

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2906, Issue , 1996, Pages 58-65

  Nakao, Masayuki ^a   Hatamura, Yotaro ^a   Sato, Tomomasa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Concentrated motion manipulator; Fast atom beam; Image assisted tele operation; Integrated production; Magnetic head; Micromachines; Scanning electron microscope; Tabletop factory

Indexed keywords

ATOMIC PHYSICS; ATOMS; COMPOSITE MICROMECHANICS; ELECTRON MICROSCOPES; MAGNETIC HEADS; MAGNETIC RECORDING; MANIPULATORS; METALLOGRAPHIC MICROSTRUCTURE; MICROSCOPES; MICROSTRUCTURE; SCANNING; SCANNING ELECTRON MICROSCOPY;

CONCENTRATED MOTION MANIPULATOR; FAST ATOM BEAM; IMAGE-ASSISTED TELE-OPERATION; INTEGRATED PRODUCTION; MICROMACHINES; SCANNING ELECTRON MICROSCOPE; TABLETOP FACTORY;

THREE DIMENSIONAL;

EID: 57949102852     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.260629     Document Type: Conference Paper

References (5)

1. Y. Hatamura, et al.; "Construction of Nano Manufacturing World", Microsystems Technologies, 1-3, 155, 1995
2. M. Nakao, et al.; "Integration of 3-D shape construction and assembly to realize micro systems", Microsystems Technologies, 1-3, 124, 1995
3. M. Nakao, et al.; "Breakthroughs in 3-D ultra-fine shape fabrication by dynamic FAB etching", Proc. of ASPE '95, 376, Austin, 1995
4. M. Nakao, et al.; "Structure and working characteristic of concentrated motion manipulator in nano manufacturing world", Proc. of JSME, 95-1(iv), 277, Tokyo, 1995
5. M. Nakao, et al.; "Micro assembly in vacuum under SEM", Proc. of JSME, 95-1 (iv), 285, Tokyo, 1995