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Volumn 2, Issue , 1996, Pages 842-849
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Micro endeffector with micro pyramids and integrated piezoresistive force sensor
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROSTATICS;
FORCE CONTROL;
FORCE MEASUREMENT;
GRIPPERS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
SENSORS;
STRAIN GAGES;
SURFACE TENSION;
VAN DER WAALS FORCES;
ADHESIVE FORCES;
INTEGRATED PIEZORESISTIVE FORCE SENSOR;
MICRO PYRAMIDS;
END EFFECTORS;
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EID: 0030397550
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (14)
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References (14)
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