Investigation of ZnO nanopillars fabrication in a new Thomas Swan close coupled showerhead MOCVD reactor

Microelectronics Journal

Volumn 40, Issue 2, 2009, Pages 280-282

  Behrends, A ^a   Bakin, A ^a   Waag, A ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

MOCVD; MOVPE; Nanopillars; Zincoxide; ZnO

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FIELD EMISSION; GALLIUM NITRIDE; GROWTH (MATERIALS); SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; ZINC OXIDE;

A PLANE; FIELD EMISSION SCANNING; GROWTH PARAMETERS; GROWTH TIME; MOCVD; MOCVD REACTOR; MOVPE; NANOPILLARS; REACTOR PRESSURES; SELF-ORGANIZED; SUBSTRATE TEMPERATURE (ST); ZNO;

COUPLED CIRCUITS;

EID: 58749085918     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2008.07.026     Document Type: Article

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