Experimental comparison of mechanically ruled and holographically recorded plane varied-line spacing gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3150, Issue , 1997, Pages 40-46

  Underwood, James H ^a   Gullikson, Eric M ^a   Koike, Masato ^a   Mrowka, Stanley ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Gratings; Monochromators; Soft x rays; Synchrotron radiation; Ultraviolet; Varied line spacing

Indexed keywords

ELECTROMAGNETIC WAVES; HOLOGRAPHIC GRATINGS; LIGHT; LIGHT SOURCES; LIGHTING; MONOCHROMATORS; SPECTRAL RESOLUTION; SYNCHROTRON RADIATION; SYNCHROTRONS;

A PLANE; ADVANCED LIGHT SOURCE (ALS); ASPHERIC; BEAM LINES; ENERGY RANGES; EV REGION; EXPERIMENTAL COMPARISON; GRATINGS; GROOVE PROFILE; MONOCHROMATOR; RECORDING SYSTEMS; RESOLUTION MEASUREMENTS; SOFT X-RAYS; ULTRAVIOLET; VARIED LINE SPACING;

X RAY LITHOGRAPHY;

EID: 58649114701     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.292734     Document Type: Conference Paper

References (7)

1. J. H. Underwood, E. M. Gullikson, M. Koike, P. C. Batson, P. B. Denham, R. Steele and R. Tackaberry "Calibration and standards beamline 6.3.2 at the ALS" Rev. Sci. Instrum. 67 (9) 1-5, (1996) (CD-ROM only).
2. J. H. Underwood, E. M. Gullikson, M. Koike and P.J.Batson "Beamline for Metrology of x-ray/EUV optics at the Advanced Light Source" in Grazing Incidence and Multilayer Optical Systems (R.B. Hoover and A.B.C. Walker II, Eds.) SPIE Conf. Proc. 3113, 214-221 (1997)
3. M. C. Hettrick and J. H. Underwood, "Varied-space grazing incidence gratings in high resolution scanning spectrometers" in Short Wavelength Coherent Radiation, Generation and Applications, J. B. Bokor and D.T. Attwood, eds. AIP Conf. Proc 147,237-245 (1986).
4. M. C. Hettrick and J. H. Underwood, "Optical system for high resolution spectrometer/monochromator", US Patent No. 4,776,696 (Oct. 11, 1988).
5. j0 up to j = 4 in the light path function for a spherical mirror and plane VLS grating.
6. M. Koike, R. Beguristain, J. H. Underwood and T. Namioka; "A new optical design method and its application to an extreme ultraviolet varied line spacing plane grating monochromator" Nucl. Inst. Methods. A 347, 273-277 (1994).
7. M. Koike and T. Namioka; "Plane gratings for high-resolution grazing incidence monochromators: holographic grating versus mechanically ruled varied-line-spacing gratings," Appl. Opt.(in press, 1997).