Effect of halogens on the formation and properties of the porous silicon layers

Semiconductors

Volumn 43, Issue 1, 2009, Pages 92-95

  Bolotov, V V ^a   Sten'kin, Yu A ^a   Davletkil'Deev, N A ^a   Krivozubov, O V ^a   Ponomareva, I V ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 58449117715     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063782609010187     Document Type: Article

References (11)

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