Identification of water molecules in low humidity and possibility of quantitative gas analysis using porous silicon gas sensor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 8, 1996, Pages 4253-4256

  Motohashi, Akira ^a   Ruike, Masatoshi ^a   Kawakami, Manabu ^a   Aoyagi, Hidekazu ^a   Kinoshita, Akira ^a   Satou, Akinobu ^b  

^a TOKYO DENKI UNIVERSITY   (Japan)

^b FUJIKURA LTD   (Japan)

Author keywords

Adsorption; Capillary condensation; Gas identification; Gas sensor; Porous silicon; Quantitative analysis; Water molecule

Indexed keywords

GAS SENSOR; QUANTITATIVE ANALYSIS; WATER MOLECULES;

ADSORPTION; CHEMICAL SENSORS; EXPERIMENTS; GASES; MOLECULES; WATER;

POROUS SILICON;

EID: 0030205931     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.4253     Document Type: Article

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