High-resolution electron beam lithography with Langmuir-Blodgett films

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 294-95, Issue , 1997, Pages 181-184

  Kim, Chang Nam ^a   Kang, Dong Woo ^a   Kim, Eung Ryul ^a   Lee, Haiwon ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COPOLYMERS; LANGMUIR BLODGETT FILMS; POLYMETHYL METHACRYLATES; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL);

ELECTRON BEAM RESISTS; SPIN CASTING;

ELECTRON BEAM LITHOGRAPHY;

EID: 5844334719     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: 10.1080/10587259708042825     Document Type: Article

References (14)

1. F. J. Hohn, J. Vac.Sci. Technol , B7(6), 1405 (1989).
2. J. Gamaes, T. Bjornholm, H A. N. Zasadzinski, J. Vac. Sci. Technol. B12, 1839 (1994)
3. R. Steitz, E. E. Mitchell and I R. Peterson, Thin Solid Films, 205, 124 (1991)
4. S. W. J. Kuan and C. W. Frank, J. Vac. Sci. Technol.,B7, 1745 (1989)
5. K. Ogawa, J. Appl. Phys., 27, 855 (1988)
6. G. G. Roberts, Langmuir-Blodgett Films (Plenum, New York, 1990)
7. I. R. Peterson, R. Steith, H. Krug, and I. Voight-Martin, J. Phys., 51, 1003 (1990)
8. R Steitz, E. E. Mitchell, and I R Peterson, Thin Solid Films, 205, 124 (1991)
9. M. Khoury, D. K Ferry, J. Vac. Sci. Technol., B14(1), 75 (1996)
10. H. Lee, S. R. Park, J. H. Heor, and B. I. Seo, Mol. Cryst. Liq Cryst., 227, 1 (1993)
11. T. Nakagawa and K. Ogawa, Langmuir, 10, 529 (1994)
12. P. K Hansma, V. B. Elings, O. Marti, C. E. Bracker, Science, 242, 209 (1988)
13. Wei Chen and Haroon Ahmed, J. Vac. Sci. Technol.,B11, 2519 (1993)
14. J. Garnaes, D. K Schwartz, R. Viswanathan and J. A N Zasadzinski, Synth. Metals, 55-57, 3795 (1993)