Effect of molecular weight on poly(methyl methacrylate) resolution

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 75-79

  Khoury, Maroun ^a   Ferry, David K ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038690775     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588437     Document Type: Article

References (22)

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16. 3 molecular weight PMMA are made by Aldrich.
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