Fabrication of precise fluidic structures in LTCC

International Journal of Applied Ceramic Technology

Volumn 6, Issue 1, 2009, Pages 18-23

  Barlow, Fred ^a   Wood, Jared ^a   Elshabini, Aicha ^a   Stephens, Edward F ^b   Feeler, Ryan ^b   Kemner, Greg ^b   Junghans, Jeremy ^b  

^a UNIVERSITY OF IDAHO   (United States)

^b Northrop Grumman Cutting Edge Optronics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATIONS; CERAMIC MATERIALS; COOLANTS; COOLING; COOLING SYSTEMS; COPPER; DEIONIZED WATER; LASERS; MULTILAYERS; PUMPING (LASER); STRUCTURAL METALS; WASTE HEAT;

BIOMEDICAL APPLICATIONS; CAVITY STRUCTURES; COMPLEX SHAPES; COPPER COOLERS; COPPER MULTILAYERS; DIMENSIONAL TOLERANCES; DIODE BARS; ELECTRICAL CURRENTS; EMERGING APPLICATIONS; EXTERNAL-; FABRICATION PROCESSES; FLUID CHANNELS; JET STRUCTURES; LASER CRYSTALS; LASER DIODE BARS; LASER DIODES; LASER SYSTEMS; LIQUID COOLANTS; LOW-TEMPERATURE CO-FIRED CERAMICS; METAL LAYERS; METAL STRUCTURES; OPERATING TEMPERATURES; OUTPUT WAVELENGTHS; OVERALL PERFORMANCES; SIGNIFICANT IMPACTS;

DIODES;

EID: 58149489297     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2008.02315.x     Document Type: Article

References (11)

1. W. A. Vitriol and J. I. Steinberg, "Development of a Low Temperature Cofired Multilayer Ceramic Technology," Proceedings of the ISHM, 593-598, 1983.
2. S. Nishigaki, S. Yano, J. Fukuta, M. Fukaya, and T. Fuwa, "A New Multilayered, Low-Temperature-Fireable Ceramic Substrate," Proceedings of the ISHM, 225-234, 1985.
3. S. Nishigaki, S. Yano, H. Kawabe, J. Fukuta, T. Nonomura, and S. Hebishima, "LFC-III: A new low temperature multilayered ceramic substrate with Au(top)-Ag(internal)-Ti/Mo/Cu(bottom) conductor system," Proceedings of the ISHM 1987, 400-407.
4. S. Nishigaki, J. Fukuta, and S. Yano, "A New Low Temperature Fireable Ag Multilayer Ceramic Substrate Having Post Fired Cu Conductor (LFC-II)," ISHM Proceedings, 429-437, 1986.
5. I. Fritsch, "Low Temperature Co-Fired Ceramics in Electrochemical Applications," Eyitayo Fakunle, Prabhu Arumugam, Padhmodhbhava Yoga Narasimhan, Melissa Weston, Emily Ander-son, Gangqiang Wang, Fred Barlow, 209th ECS Meeting, Denver, CO, May 7-12, 2006.
6. K. Malecha, D. Pijanowska, L. Golonka, and W. Torbicz, "LTCC Enzymatic Microreactor," J. Microelectron. Electron. Packaging, 4 [2] 51-56 (2007).
7. C. K. Ho, K. A. Peterson, L. K. McGrath, and T. S. Turner, "Development of LTCC Smart Channels for Integrated Chemical, Temperature, and Flow Sensing," J. Microelectron. Electron. Packaging, 3 [3] 136-144 (2006).
8. K. D. Patel, K. A. Peterson, and K. W. Hukari, "Low Temperature Cofired Ceramic Microfluidic Microsystems for High Temperature and High Pressure Applications," J. Microelectron. Electron. Packaging, 3 [3] 109-120 (2006).
9. J. Youngsman, B. Marx, S. Wolter, J. Glass, and A. Moll, "Miniature Multi-Electrode Electrochemical Cell in LTCC," J. Microelectron. Electron. Packaging, 4 [1] 31-36 (2007).
10. K. Saxena, G. Wang, F. Barlow, S. Ang, and A. Elshabini, "A Microjet Array Air Impingement Cooling Package Fabricated using Low Temperature Cofired Ceramic," IMAPS Ceramics Conference, Denver, CO, April 26-28, 2004.
11. E. F. Stephens, R. Feeler, G. Kemner, F. Barlow, J. Wood, and A. Elshabini, "Micro-fluidic Optoelectronic Packages based on LTCC," Proceedings of the 2007 International Microelectronics and Packaging Conference, San Jose, CA, November 2007 429-436.