Fabrication of high-aspect ratio micro holes on hard brittle materials - Study on electrorheological fluid-assisted micro ultrasonic machining

Key Engineering Materials

Volumn 389-390, Issue , 2009, Pages 264-270

  Tateishi, T ^a   Yoshihara, N ^a   Yan, J ^a   Kuriyagawa, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Abrasive grains; Electrorheological fluid; Hard brittle materials; High aspect ratio; Micro hole; Ultrasonic machining

Indexed keywords

ABRASIVES; BRITTLENESS; ELECTRIC FIELDS; ELECTRORHEOLOGICAL FLUIDS; MACHINING; MICROANALYSIS; MICROFABRICATION; NANOFLUIDICS; RHEOLOGY; ULTRASONIC CUTTING;

ABRASIVE GRAINS; HARD BRITTLE MATERIALS; HIGH ASPECT RATIO; MICRO HOLES; ULTRASONIC MACHINING;

ASPECT RATIO;

EID: 58149487842     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

References (8)

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8. T. Tateishi, Y Yoshihara, J. Yan and T. Kuriyagawa: Fabrication of Micro Grooves on Hard Brittle Materials -Study on Electrorheological Fluid Assisted Ultrasonic Machining-, Proceedings of the 4th International Conference of Leading Edge Manufacturing in 21st Century, No. 07-205, (2007), pp. 765-770