Morphology and microstructure analysis of nano-silver thin films deposited by laser-assisted maskless microdeposition

Journal of Micromechanics and Microengineering

Volumn 18, Issue 11, 2008, Pages

  Alemohammad, Hamidreza ^a   Aminfar, Omid ^a   Toyserkani, Ehsan ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (OPTICAL); DESIGN OF EXPERIMENTS; DIFFRACTIVE OPTICAL ELEMENTS; ELECTRIC CONDUCTIVITY; LASERS; MICROSTRUCTURE; OPTICAL PROPERTIES; OPTIMIZATION; SCANNING; SCANNING ELECTRON MICROSCOPY; SINTERING;

DEPOSITED LAYERS; DEPOSITION THICKNESSES; EFFECTIVE ENERGIES; ELECTRICAL CONDUCTIVITIES; LASER POWERS; LAYER BY LAYERS; MASK LESS; MICRODEPOSITION; MICROSTRUCTURAL ANALYSES; MICROSTRUCTURE ANALYSES; NANOINDENTATION INSTRUMENTS; PROCESS OPTIMIZATIONS; SCANNING SPEEDS; SILVER THIN FILMS; SINTERED SAMPLES; WHITE LIGHT INTERFEROMETRIES; YOUNG'S MODULUS;

SILVER;

EID: 58149374510     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/11/115015     Document Type: Article

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