Femtosecond fiber laser enables reliable wafer-level processing

Laser Focus World

Volumn 44, Issue 12, 2008, Pages 61-64

  Shah, Lawrence ^a,b   Monro, Kiyomi ^a   Cho, Gyu C ^c  

^a IMRA America ^*

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

^c IMRA AMERICA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMERICA; BEAM PROPAGATIONS; CHIRPED PULSES; COMPACT PACKAGES; FEMTOSECOND FIBER LASERS; FEMTOSECOND LASERS; LASER SYSTEMS; LEVEL PROCESSING; NEW SYSTEMS; THERMAL LENSING;

AMPLIFICATION; FIBER LASERS; FIBERS; INDUSTRIAL APPLICATIONS; LASERS; PULSE AMPLIFIERS;

PULSED LASER APPLICATIONS;

EID: 58149299899     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)

1. J. Li et al., Proc. Electronic Components and Tech. Conf. 2007, p. 751 (May 29-June 1, 2007).
2. L. Migliore, Proc. SPIE 6458 (2007).
3. T. H. R. Crawford et al., Appl. Phys. A 80, 1717 (2005).
4. H.K.Tönshoff et al., Third Int'l. Symposium on Laser Precision Microfabrication, Proc. SPIE 4830, 531 (2003).
5. Z. Liu et al., Photonics West 2005 post-deadline paper (2005).
6. L. Shah et al., Optics Exp. 13(12) 4717 (2005).
7. S. Eaton et al., Optics Express 73(12) 4708 (2005).